What Does BOE Stand For?

BOE stands for Buffered Oxide Etch

Buffered Oxide Etch (BOE) is a chemical solution commonly used in semiconductor manufacturing to selectively remove silicon dioxide (SiO2) while minimizing the etching of underlying materials. It typically consists of a mixture of hydrofluoric acid (HF) and ammonium fluoride (NH4F), which together maintain a balanced pH. BOE is crucial in processes such as photolithography, where precise control over the etching of oxide layers is essential for creating intricate microelectronic structures. Its ability to provide a controlled etch rate and reduce surface roughness makes it an important tool in the fabrication of integrated circuits and MEMS devices.

Other Meanings for BOE