What Does BPSG Stand For?
BPSG stands for Borophosphosilicate Glass
BPSG, or Borophosphosilicate Glass, is a specialized type of glass material commonly used in the semiconductor industry. It is characterized by its unique composition, which includes boron and phosphorus in addition to silicon. BPSG is primarily utilized as a dielectric layer and as a chemical mechanical polishing (CMP) stop layer in integrated circuit manufacturing. Its properties, such as low thermal expansion and excellent film quality, make it an ideal choice for advanced microelectronic applications, enhancing device performance and reliability.
Added on 14th April 2008 | Last edited on 16th June 2025 | Edit Acronym