What Does ELA Stand For?
ELA stands for Excimer Laser Annealing
Excimer Laser Annealing (ELA) is a precise thermal processing technique that utilizes high-intensity ultraviolet light emitted from excimer lasers to anneal thin films and semiconductor materials. This method effectively repairs defects, enhances crystallinity, and improves material properties, making it essential for applications in microelectronics and optoelectronics. ELA offers high spatial resolution and control, enabling the fabrication of advanced devices with optimized performance characteristics.
Added on 14th April 2008 | Last edited on 16th June 2025 | Edit Acronym