What Does SXPL Stand For?

SXPL stands for Soft X Ray Projection Lithography

SXPL, or Soft X Ray Projection Lithography, is an advanced lithographic technique that utilizes soft X-ray radiation for high-resolution patterning of micro and nanoscale structures. This method enables the fabrication of intricate features with reduced exposure wavelengths, enhancing the precision and scalability of semiconductor manufacturing and other applications in nanotechnology. SXPL is particularly advantageous in producing smaller, more complex patterns beyond the capabilities of traditional optical lithography, thereby pushing the boundaries of modern fabrication techniques.