What Does VASE Stand For?

VASE stands for Variable Angle Spectroscopic Ellipsometry

VASE, or Variable Angle Spectroscopic Ellipsometry, is an advanced optical characterization technique used for determining the thickness and optical properties of thin films and layered materials. By measuring the complex reflection and transmission of light at varying angles and wavelengths, VASE provides detailed information about material composition, layer uniformity, and film structural properties. This non-destructive method is widely employed in fields such as semiconductor manufacturing, materials science, and nanotechnology for precise analysis and quality control.